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Preventing Cracks in Silicon-Reactor LinersCorrect placement helps prevent contamination while eliminating crack-causing deposits. Repositioning quartz liner in silicon fluidized-bed reactor prevents cracking of liner when cools. Liner protects stainless-steel walls of reactor from abrasion by particles in fluidized bed. Prevents contamination of newly formed silicon by material abraded from wall and ensures high-quality product.
Document ID
19870000043
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Lutwack, R.
(Caltech)
Date Acquired
August 13, 2013
Publication Date
January 1, 1987
Publication Information
Publication: NASA Tech Briefs
Volume: 11
Issue: 1
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-16708
Accession Number
87B10043
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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