Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Spalvins, T. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 13, 2013
Publication Date
April 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 5
ISSN: 0734-2101
Accession Number
87A35332
Distribution Limits
Public