Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Pearson, E. M. (Stanford Univ. CA, United States) Halicioglu, T. (Stanford Univ. CA, United States) Tiller, W. A. (Stanford University CA, United States) Date Acquired
August 13, 2013
Publication Date
June 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 5
ISSN: 0734-2101
Accession Number
87A43475
Funding Number(s)
CONTRACT_GRANT: NCC2-297
CONTRACT_GRANT: MDA903-79-C-0578
CONTRACT_GRANT: NCC2-125
CONTRACT_GRANT: MDA903-83-K-0041
Distribution Limits
Public