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Vibrations Would Induce Flow In Molten SiliconFlow patterns and velocities controlled to improve cystals. According to proposal, intense sound used to induce flow in molten silicon to increase quality of crystals grown in shallow-melt Czochralski process.
Document ID
19880000614
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Barmatz, M. B.
(Caltech)
Morrison, A. D.
(Caltech)
Date Acquired
August 13, 2013
Publication Date
December 1, 1988
Publication Information
Publication: NASA Tech Briefs
Volume: 12
Issue: 11
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-17087
Accession Number
88B10614
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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