Imaging and nondispersive spectroscopy of soft X rays using a laboratory X-ray charge-coupled-device system

This paper describes the design and performance of a laboratory instrument for imaging and nondispersive spectroscopy of soft X-rays (300 eV to 10 keV) utilizing a virtual-phase CCD. This instrument has achieved a spatial resolution of 22 microns (limited by pixel size) with an overall array area of 584 x 390 pixels. It has achieved an energy resolution of about 140 eV FWHM for single-pixel Fe-55 X-ray events (5.9 keV) with the CCD operated at -30 C. The CCD has been operated in photon-counting mode at room temperature, and X-ray spectra with an energy resolution of about 450 eV at 5.9 keV have been obtained. The low energy X-ray sensitivity of the CCD also has been demonstrated by detecting carbon K-alpha X-rays (277eV).