Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Biedenbender, Michael D. (Cincinnati Univ. OH, United States) Kapoor, Vik J. (Cincinnati, University OH, United States) Williams, W. D. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 13, 2013
Publication Date
August 1, 1987
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 5
ISSN: 0734-2101
Accession Number
88A26196
Distribution Limits
Public