Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Mii, Y. J. (California Univ. Los Angeles, CA, United States) Kao, Y. C. (California Univ. Los Angeles, CA, United States) Wu, B. J. (California Univ. Los Angeles, CA, United States) Wang, K. L. (California, University Los Angeles, United States) Lin, T. L. (California Univ. Los Angeles, CA, United States) Liu, J. K. (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States) Date Acquired
August 13, 2013
Publication Date
April 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 6
ISSN: 0734-211X
Accession Number
88A35861
Funding Number(s)
CONTRACT_GRANT: NSF DMR-84-2119
Distribution Limits
Public