Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Kaiser, W. J. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Bell, L. D. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Hecht, M. H. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Grunthaner, F. J. (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States) Date Acquired
August 13, 2013
Publication Date
April 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 6
ISSN: 0734-2101
Accession Number
88A48444
Distribution Limits
Public