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Microtronic Flow TransducerNovel microelectronic airflow and gas-flow transducer developed. Has no moving parts and constructed by use of variation on ordinary technology for processing of planar silicon microelectronics, where hundreds or thousands of identical devices concurrently produced on single chip as easily as can one. Gas-flow transducer based upon integrated Wheatstone bridge in silicon chip. Legs doped with gold and isolated thermally by etching away surrounding material (except corners). Because of small size, sensitivity, and good directional capability of new transducer, numerous potential applications in measurement of vortexes, flows in inlets to pipes, and other complicated flows.
Document ID
19890000216
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Sundberg, Gale R.
(NASA Lewis Research Center, Cleveland, OH.)
Henderson, H. T.
(University of Cincinnati)
Hsieh, M. Walter
(University of Cincinnati)
Date Acquired
August 14, 2013
Publication Date
May 1, 1989
Publication Information
Publication: NASA Tech Briefs
Volume: 13
Issue: 5
ISSN: 0145-319X
Subject Category
Electronic Components And Circuits
Report/Patent Number
LEW-14654
Accession Number
89B10216
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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