Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Schowengerdt, F. D. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Grunthaner, F. J. (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States) Date Acquired
August 13, 2013
Publication Date
August 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 6
ISSN: 0734-211X
Accession Number
89A10839
Distribution Limits
Public