Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Mesarwi, A. (Houston Univ. TX, United States) Ignatiev, A. (Houston, University TX, United States) Date Acquired
August 14, 2013
Publication Date
December 1, 1988
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 6
ISSN: 0734-2101
Accession Number
89A17346
Distribution Limits
Public