In-situ measurement of processing properties during fabrication in a production tool

Progress is reported on the use of frequency-dependent electromagnetic measurements (FDEMs) as a single, convenient technique for continuous in situ monitoring of polyester cure during fabrication in a laboratory and manufacturing environment. Preliminary FDEM sensor and modeling work using the Loss-Springer model in order to develop an intelligent closed-loop, sensor-controlled cure process is described. FDEMs using impedance bridges in the Hz to MHz region is found to be ideal for automatically monitoring polyester processing properties continuously throughout the cure cycle.