Calibration of single particle sizing velocimeters using photomask reticlesThe development of photomask reticle calibration standards for single particle instruments is discussed. The calibration method studied involves the use of photomask reticles where the particle artifacts are actually disks of chrome thin film in the clear field reticles produced by photolithography and etching processes. Consideration is given to various aspects of theory, design, and performance.
Document ID
19890046008
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Hirleman, E. D. (Arizona State University Tempe, United States)
Holve, D. J. (Insitec, Inc. San Ramon, CA, United States)
Hovenac, E. A. (NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 14, 2013
Publication Date
January 1, 1988
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: International Symposium on Applications of Laser Anemometry to Fluid Mechanics
Location: Lisbon
Country: Portugal
Start Date: July 11, 1988
End Date: July 14, 1988
Sponsors: Universidade Tecnica de Lisboa, U.S. Army, CEC