Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Nouhi, A. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Stirn, R. J. (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States) Meyers, P. V. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Liu, C. H. (Ametek Applied Materials Laboratory Harleysville, PA, United States) Date Acquired
August 14, 2013
Publication Date
June 1, 1989
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 7
ISSN: 0734-2101
Subject Category
Energy Production And Conversion Accession Number
89A44519
Distribution Limits
Public