Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Meyer, Duane E. (Nebraska Univ. Lincoln, NE, United States) Dillon, Rodney O. (Nebraska Univ. Lincoln, NE, United States) Woollam, John A. (Nebraska, University Lincoln, United States) Date Acquired
August 14, 2013
Publication Date
June 1, 1989
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 7
ISSN: 0734-2101
Accession Number
89A44552
Distribution Limits
Public