Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Ramesham, R. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Daud, T. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Moopenn, A. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Thakoor, A. P. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Khanna, S. K. (California Institute of Technology Jet Propulsion Laboratory, Pasadena, United States) Date Acquired
August 14, 2013
Publication Date
June 1, 1989
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 7
ISSN: 0734-211X
Subject Category
Electronics And Electrical Engineering Accession Number
89A53171
Distribution Limits
Public