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Ballistic-Electron-Emission MicroscopeBallistic-electron-emission microscope (BEEM) employs scanning tunneling-microscopy (STM) methods for nondestructive, direct electrical investigation of buried interfaces, such as interface between semiconductor and thin metal film. In BEEM, there are at least three electrodes: emitting tip, biasing electrode, and collecting electrode, receiving current crossing interface under investigation. Signal-processing device amplifies electrode signals and converts them into form usable by computer. Produces spatial images of surface by scanning tip; in addition, provides high-resolution images of buried interface under investigation. Spectroscopic information extracted by measuring collecting-electrode current as function of one of interelectrode voltages.
Document ID
19900000012
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Kaiser, William J.
(Caltech)
Bell, L. Douglas
(Caltech)
Date Acquired
August 14, 2013
Publication Date
January 1, 1990
Publication Information
Publication: NASA Tech Briefs
Volume: 14
Issue: 1
ISSN: 0145-319X
Subject Category
Physical Sciences
Report/Patent Number
NPO-17384
Accession Number
90B10012
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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