Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Wahi, A. K. (Stanford Univ. CA, United States) Miyano, K. (Stanford Univ. CA, United States) Carey, G. P. (Stanford Univ. CA, United States) Chiang, T. T. (Stanford Univ. CA, United States) Lindau, I. (Stanford University CA, United States) Date Acquired
August 14, 2013
Publication Date
June 1, 1990
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 8
ISSN: 0734-2101
Accession Number
90A36800
Funding Number(s)
CONTRACT_GRANT: NAG1-851
CONTRACT_GRANT: N00014-86-K-0854
CONTRACT_GRANT: DE-AC03-82ER-13000
Distribution Limits
Public