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Simple evaporation controller for thin-film deposition from a resistively heated boatA simple, inexpensive circuit is described for switching the current through a resistively heated evaporation boat during thin-film deposition. The circuit uses a silicon-controlled rectifier (SCR) to switch the 0-15-A current in the primary of a 2-kV A step-down transformer that supplies the 0-200-A current to an evaporation boat. The circuit is controlled by a 0-10 V-dc signal similar to that furnished by an Inficon XTC deposition-rate controller. This circuit may be assembled from a handful of parts for a cost of about $400, nearly one-tenth the cost of similar commercial units. Minimum construction is required, since the circuit is built around an off-the-shelf, self-contained SCR unit.
Document ID
19900052706
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Scofield, John H.
(Oberlin Coll. OH, United States)
Bajuk, Lou
(Oberlin Coll. OH, United States)
Mohler, William
(Oberlin College OH, United States)
Date Acquired
August 14, 2013
Publication Date
July 1, 1990
Publication Information
Publication: Review of Scientific Instruments
Volume: 61
ISSN: 0034-6748
Subject Category
Electronics And Electrical Engineering
Accession Number
90A39761
Funding Number(s)
CONTRACT_GRANT: NAG3-885
Distribution Limits
Public
Copyright
Other

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