High current hollow cathode phenomenaExperimental results show that the energies of ions produced near a hollow cathode orifice can be several times the anode-to-cathode potential difference generally considered available to accelerate them. These energies (of order 50 eV) are sufficient to induce substantial sputter erosion rates. Increases in discharge current (to 60 A) cause the energies and current densities of these jet ions to increase substantially. A model describing jet ion generation is proposed. The effects of discharge current on cathode internal pressure are also examined experimentally and described phenomenologically.
Document ID
19900055509
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Friedly, Verlin J. (Colorado State Univ. Fort Collins, CO, United States)
Wilbur, Paul J. (Colorado State University Fort Collins, United States)