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Plasma-deposited amorphous hydrogenated carbon films and their tribological propertiesRecent work on the properties of diamondlike carbon films and their dependence on preparation conditions are reviewed. The results of the study indicate that plasma deposition enables one to deposit a variety of amorphous hydrogenated carbon (a-C:H) films exhibiting more diamondlike behavior to more graphitic behavior. The plasma-deposited a-C:H can be effectively used as hard, wear-resistant, and protective lubricating films on ceramic materials such as Si(sub 3)N(sub 4) under a variety of environmental conditions such as moist air, dry nitrogen, and vacuum.
Document ID
19900057809
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Miyoshi, K.
(NASA Lewis Research Center Cleveland, OH, United States)
Pouch, J. J.
(NASA Lewis Research Center Cleveland, OH, United States)
Alterovitz, S. A.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 14, 2013
Publication Date
January 1, 1989
Publication Information
Publication: Materials Science Forum
Volume: 52-53
ISSN: 0255-5476
Subject Category
Nonmetallic Materials
Accession Number
90A44864
Distribution Limits
Public
Copyright
Other

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