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Molecular-Beam Epitaxy Of IrSi3Molecular-beam epitaxy grows layers of iridium silicide (IrSi3) on silicon at temperatures of 630 to 800 degrees C. Particularly useful as photodetector material because it forms Schottky diodes having potential barriers of only 0.12 to 0.15 eV - lowest of any metal on silicon. Photodiodes sensitive to infrared radiation at wavelengths as large as 8 to 10 micrometers. New, lower formation temperature expected to enable growth of arrays of IrSi3/Si infrared detectors on Si wafers without thermally damaging image-processing circuitry integrated on wafers.
Document ID
19910000066
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Lin, True-Lon
(Caltech)
Date Acquired
August 14, 2013
Publication Date
February 1, 1991
Publication Information
Publication: NASA Tech Briefs
Volume: 15
Issue: 2
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-17953
Accession Number
91B10066
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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