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Deposition Of Diamondlike Films By ECR Microwave PlasmaHard, amorphous hydrogenated carbon films of diamondlike quality deposited at room temperature on silicon, optical glass, and quartz through decomposition of CH4 in electron-cyclotron-resonance (ECR) microwave plasma of CH4 diluted with H2. Technique provides hard, abrasion-resistant coatings for lenses and other optical components. Films chemically inert and posses high electrical resistivity and breakdown fields, valuable properties in microelectronics applications.
Document ID
19910000509
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Pool, Frederick S.
(Caltech)
Shing, Yuh-Han
(Caltech)
Date Acquired
August 14, 2013
Publication Date
October 1, 1991
Publication Information
Publication: NASA Tech Briefs
Volume: 15
Issue: 10
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-18094
Accession Number
91B10509
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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