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Fluidized-Bed Silane-Decomposition ReactorFluidized-bed pyrolysis reactor produces high-purity polycrystalline silicon from silane or halosilane via efficient heterogeneous deposition of silicon on silicon seed particles. Formation of silicon dust via homogeneous decomposition of silane minimized, and deposition of silicon on wall of reactor effectively eliminated. Silicon used to construct solar cells and other semiconductor products.
Document ID
19910000589
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Iya, Sridhar K.
(Union Carbide Corp.)
Date Acquired
August 14, 2013
Publication Date
November 1, 1991
Publication Information
Publication: NASA Tech Briefs
Volume: 15
Issue: 11
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-18014
Accession Number
91B10589
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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