Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Wheeler, Donald R. (NASA Lewis Research Center Cleveland, OH, United States) Pepper, Stephen V. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 15, 2013
Publication Date
December 1, 1990
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 8
ISSN: 0734-2101
Accession Number
91A16138
Distribution Limits
Public