Electronically scanned multichannel pressure transducer system for cryogenic environments

Research into the application of custom doped piezoresistive silicon pressure sensors has led to a multichannel pressure sensor design that will operate accurately and reliably at cryogenic temperatures. The thermal effects upon multichannel pressure sensors are mapped by thermal calibrations and are represented by sets of nth order coefficients specific to each sensor. The thermal offset and sensitivity variations are corrected by computer algorithms which scan the sensors, recall correction coefficients from thermally induced sensor variations, and apply these to correct the sensor's output measurement uncertainty to within 0.5 percent of full scale output for combined offset and sensitivity. A prototype sensor system has been fabricated, and performance test data are presented.