Ellipsometric analysis of materials degradation in spaceThe fundamentals of variable angle spectroscopic ellipsometry (VASE) are reviewed, and its usefulness in studying the effect of atomic oxygen on space coatings such as indium tin oxide (ITO), silicon dioxide, and aluminum oxide is discussed. Monolayer sensitive and nondestructive VASE is found to be an effective technique for monitoring the atomic oxygen diffusion through the aluminum oxide and silicon dioxide protective overcoatings on space reflectors. Ashing of ITO/silicon samples had the net effect of annealing the film inside the plasma. The annealing effect was supported both by structural changes as verified by X-ray diffraction measurements and by increased absorbance in the spectral range below 3 eV as measured by VASE.
Document ID
19910065188
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Woollam, John A. (Nebraska Univ. Lincoln, NE, United States)
Snyder, Paul G. (Nebraska Univ. Lincoln, NE, United States)
De, Bhola N. (Nebraska, University Lincoln, United States)
Date Acquired
August 14, 2013
Publication Date
January 1, 1990
Subject Category
Nonmetallic Materials
Meeting Information
Meeting: Annual Meeting of the Minerals, Metals, and Materials Society
Location: Anaheim, CA
Country: United States
Start Date: February 17, 1990
End Date: February 22, 1990
Sponsors: Minerals, Metals and Materials Society, ASM International