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Projected-Fringe, Phase-Stepping ProfilometerProjected-fringe, phase-stepping profilometer is system of optical, electronic, optoelectronic, and electro-optical equipment measuring surface profiles of objects. Projects optical interference pattern onto object and steps phase of pattern to extract phases of interfering beams where they intersect object. Data obtained within seconds. Noncontact, full-field surface profilometer has applications, including inspection of machined and ceramic parts, printed circuit boards, and optical components. Rugged and compact, measures surfaces with variety of sizes and finishes.
Document ID
19920000506
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Mercer, Carolyn
(NASA Lewis Research Center, Cleveland, OH.)
Beheim, Glenn
(NASA Lewis Research Center, Cleveland, OH.)
Date Acquired
August 15, 2013
Publication Date
September 1, 1992
Publication Information
Publication: NASA Tech Briefs
Volume: 16
Issue: 9
ISSN: 0145-319X
Subject Category
Electronic Systems
Report/Patent Number
LEW-14996
Accession Number
92B10506
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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