An electrostatically suspended, micro-mechanical rate gyroscope

SatCon Technology has performed a study of micromechanical gyroscopes. The goals of this program were to define a baseline system configuration and establish technical feasibility for proof of principle and prototype fabrication. This report documents the research and presents the baseline mechanical design, sensors, control systems, and electronics. This section presents a project overview and specific technical objectives. Section 2 contains a background on micromechanical technology. Section 3 contains the microgyroscope specifications and configurations. Section 4 contains the electromechanical design. Section 5 outlines the control and electronics. Section 6 presents a preliminary sequence for microfabrication of the baseline design, and Section 7 contains conclusions and recommendations for further work.