Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Robert Baumbick (Lewis Research Center Cleveland, OH, United States) Date Acquired
August 15, 2013
Publication Date
September 21, 1990
Publication Information
Publication: Proceedings of SPIE: Integrated Optics and Optoelectronics II
Publisher: Society of Photo-optical Instrumentation Engineers
Volume: 1374
Issue Publication Date: February 1, 1991
ISSN: 0277-786X
e-ISSN: 1996-756X
Meeting Information
Meeting: SPIE Microelectronic Interconnect and integrated processing symposium
Location: San Jose, CA
Country: US
Start Date: September 16, 1990
End Date: September 21, 1990
Sponsors: International Society for Optical Engineering
Accession Number
92A46246
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.