Conductor-backed coplanar waveguide resonators of YBa2Cu3O(7-delta) on LaAlO3

Conductor-backed coplanar waveguide (CBCPW) resonators operating at 10.8 GHz have been fabricated from laser ablated and off-axis magnetron sputtered YBa2Cu3O(7-delta) (YBCO) high-temperature superconducting (HTS) thin films on LaAlO3. These resonators were tested in the temperature range from 14 to 92 K. The unloaded quality factor at 77 K of the HTS CBCPW resonators was 3 to 4 times that of a similar gold resonator. To the authors' knowledge, these results represent the first reported measurements of HTS-based CBCPW resonators.