Micromachined Dust Traps

Micromachined traps devised to capture dust particles for analysis without contaminating them. Based on micromachined structures retaining particles, rather than adhesives or greases interfering with scanning-electron-microscope analysis or x-ray imaging. Unlike maze traps and traps enmeshing particles in steel wool or similar materials, micromachined traps do not obscure trapped particles. Internal geometries of traps range from simple cones to U-shapes, all formed by etching silicon.