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Amorphous-Carbon FilmsReport describes structure, preparation, characterization, and applications of films of amorphous-carbon. Amorphous-carbon films potentially useful as masks in x-ray lithography, layers for passivation of high-speed microelectronic circuits, hard films to protect magnetic recording media and optical components from degradation by chemical etching or wear, and radiation detectors.
Document ID
19930000428
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Pouch, John J. (NASA Lewis Research Center, Cleveland, OH.)
Alterovitz, Samuel A. (NASA Lewis Research Center, Cleveland, OH.)
Date Acquired
August 16, 2013
Publication Date
July 1, 1993
Publication Information
Publication: NASA Tech Briefs
Volume: 17
Issue: 7
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
LEW-15298
Accession Number
93B10428
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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