Micromachined Electron-Tunneling Infrared Detectors

Pneumatic/thermal infrared detectors based partly on Golay-cell concept, but smaller and less fragile. Include containers filled with air or other gas trapped behind diaphragms. Infrared radiation heats sensors, causing gas to expand. Resulting deflections of diaphragms measured by displacement sensors based on principle of electron-tunneling transducers of scanning tunneling microscopes. Exceed sensitivity of all other miniature, uncooled infrared sensors presently available. Expected to include low consumption of power, broadband sensitivity, room-temperature operation, and invulnerability to ionizing radiation.