Fabrication of thin film heat flux sensors

Thin-film heat-flux sensors have been constructed in the form of arrays of thermocouples on upper and lower surfaces of an insulating layer, so that flux values are proportional to the temperature difference across the upper and lower surface of the insulation material. The sensor thermocouples are connected in thermopile arrangement, and the structure is patterned with photolithographic techniques. Both chromel-alumel and Pt-Pt/Rh thermocouples have been devised; the later produced 28 microvolts when exposed to the radiation of a 1000 C furnace.