Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Walikainen, Dale (NASA Langley Research Center Hampton, VA, United States) Date Acquired
August 15, 2013
Publication Date
April 1, 1992
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 10
Issue: 2
ISSN: 0734-2101
Accession Number
93A17576
Distribution Limits
Public