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Thin film diamond temperature sensor array for harsh aerospace environmentThe feasibility of using polycrystalline CVD diamond films as temperature sensors in harsh aerospace environment associated with hypersonic flights was tested using patterned diamond resistors, fabricated on flat or curved oxidized Si surfaces, as temperature sensors at temperatures between 20 and 1000 C. In this temperature range, the measured resistance was found to vary over 3 orders of magnitude and the temperature coefficient of resistance to change from 0.017/K to 0.003/K. After an annealing treatment, the resistance change was reproducible within 1 percent on the entire temperature range for short measuring times.
Document ID
19930044173
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Aslam, M.
(NASA Langley Research Center Hampton, VA, United States)
Masood, A.
(Michigan State Univ. East Lansing, United States)
Fredricks, R. J.
(West Michigan, Research and Technology Inst. Grand Rapids, MI, United States)
Tamor, M. A.
(Ford Motor Co. Dearborn, MI, United States)
Date Acquired
August 16, 2013
Publication Date
January 1, 1992
Publication Information
Publication: In: Sensors and sensor systems for guidance and navigation II; Proceedings of the Meeting, Orlando, FL, Apr. 22, 23, 1992 (A93-28151 10-35)
Publisher: Society of Photo-Optical Instrumentation Engineers
Subject Category
Solid-State Physics
Accession Number
93A28170
Funding Number(s)
CONTRACT_GRANT: NAG1-1328
Distribution Limits
Public
Copyright
Other

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