Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Herrera-Fierro, Pilar (NASA Lewis Research Center Cleveland, OH, United States) Jones, William R., Jr. (NASA Lewis Research Center Cleveland, OH, United States) Pepper, Stephen V. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 16, 2013
Publication Date
April 1, 1993
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 11
Issue: 2
ISSN: 0734-2101
Accession Number
93A38473
Distribution Limits
Public