Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Dalins, I. (NASA Marshall Space Flight Center Huntsville, AL, United States) Karimi, M. (Alabama Agricultural and Mechanical Univ. Normal, United States) Date Acquired
August 16, 2013
Publication Date
August 1, 1992
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 10
Issue: 4
ISSN: 0734-2101
Accession Number
93A44881
Distribution Limits
Public