Determining electron temperature and density in a hydrogen microwave plasma

A three-temperature thermo-chemical model is developed for analyzing the chemical composition and energy states of a hydrogen microwave plasma used for studying diamond deposition. The chemical and energy exchange rate coefficients are determined from cross section data, assuming Maxwellian velocity distributions for electrons. The model is reduced to a zero-dimensional problem to solve for the electron temperature and ion mole fraction, using measured vibrational and rotational temperatures. The calculations indicate that the electron temperature may be determined to within a few percent error even though the uncertainty in dissociation fraction is many times larger.