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Sputtering of cobalt and chromium by argon and xenon ions near the threshold energy regionSputtering yields of cobalt and chromium by argon and xenon ions with energies below 50 eV are reported. The targets were electroplated on copper substrates. Measurable sputtering yields were obtained from cobalt with ion energies as low as 10 eV. The ion beams were produced by an ion gun. A radioactive tracer technique was used for the quantitative measurement of the sputtering yield. Co-57 and Cr-51 were used as tracers. The yield-energy curves are observed to be concave, which brings into question the practice of finding threshold energies by linear extrapolation.
Document ID
19930071501
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Handoo, A. K.
(NASA Marshall Space Flight Center Huntsville, AL, United States)
Ray, P. K.
(Tuskegee Univ. AL, United States)
Date Acquired
August 16, 2013
Publication Date
April 1, 1993
Publication Information
Publication: Canadian Journal of Physics
Volume: 71
Issue: 4-Mar
ISSN: 0008-4204
Subject Category
Plasma Physics
Accession Number
93A55498
Funding Number(s)
CONTRACT_GRANT: NAG8-020
Distribution Limits
Public
Copyright
Other

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