Ion Accelerator With Negatively Biased Decelerator Grid

Three-grid ion accelerator in which accelerator grid is biased at negative potential and decelerator grid downstream of accelerator grid biased at smaller negative potential. This grid and bias arrangement reduces frequency of impacts, upon accelerator grid, of charge-exchange ions produced downstream in collisions between accelerated ions and atoms and molecules of background gas. Sputter erosion of accelerator grid reduced.