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A technique for eliminating white phosphorus deposits in vapor phase epitaxy systemsA technique of heating the exhaust lines is described whereby phosphorus in the exhaust portion of an organometallic vapor phase epitaxy reactor is encouraged to deposit in the red form rather than the pyrophoric white form. This technique is simple, effective, and does not hinder or limit the conditions under which the reactor may be operated.
Document ID
19940034141
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Wilt, D. M.
(NASA Lewis Research Center Cleveland, OH, United States)
Hoffman, R. W.
(Analex Corp. Cleveland, OH, United States)
Date Acquired
August 16, 2013
Publication Date
September 1, 1993
Publication Information
Publication: Review of Scientific Instruments
Volume: 64
Issue: 9
ISSN: 0034-6748
Subject Category
Inorganic And Physical Chemistry
Accession Number
94A10796
Distribution Limits
Public
Copyright
Other

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