Metallurgical coatings and thin films; Proceedings of the International Conference, 18th, San Diego, CA, Apr. 22-26, 1991. Vols. 1 & 2A conference on metallurgical coatings and thin films produced papers in the areas of coatings for use at high temperatures; hard coatings and deposition technologies; diamonds and related materials; tribological coatings/surface modifications; thin films for microelectronics and high temperature superconductors; optical coatings, film characterization, magneto-optics, and guided waves; and methods for characterizing films and modified surfaces.
Document ID
19950047657
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Authors
Mcguire, Gary E. (Microelectronics Center of NC, Research Triangle Park, NC United States)
Mcintyre, Dale C. (Sandia National Labs. Albuquerque, NM, United States)
IDRelationTitle19950047806WorkStudy of InGaAs-based modulation doped field effect transistor structures using variable-angle spectroscopic ellipsometry19950047800WorkOxygen plasma ashing effects on aluminum and titanium space protective coatings19950047708WorkHigh rate reactive sputtering of MoN(x) coatings19950047706WorkMulti-cathode unbalanced magnetron sputtering systems19950047762WorkConcentration transient analysis of antimony surface segregation during Si(100) molecular beam epitaxy19950047805WorkIn-situ ellipsometric studies of optical and surface properties of GaAs(100) at elevated temperatures19950047777WorkMagnetic flux relaxation in YBa2Cu3)(7-x) thin film: Thermal or athermal