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Infrared bolometers with silicon nitride micromesh absorbersSensitive far infrared and millimeter wave bolometers fabricated from a freestanding membrane of low stress silicon nitride are reported. The absorber, consisting of a metallized silicon nitride micromesh thermally isolated by radial legs of silicon nitride, is placed in an integrating cavity to efficiently couple to single mode or multiple mode infrared radiation. This structure provides low heat capacity, low thermal conduction and minimal cross section to energetic particles. A neutron transmutation doped Ge thermister is bump bonded to the center of the device and read out with evaporated Cr-Au leads. The limiting performance of the micromesh absorber is discussed and the recent results obtained from a 300 mK cold stage are summarized.
Document ID
19970018420
Acquisition Source
Headquarters
Document Type
Conference Paper
Authors
Bock, J. J.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States)
Turner, A. D.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States)
DelCastillo, H. M.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States)
Beeman, J. W.
(California Univ. Berkeley. Lawrence Berkeley Lab, CA United States)
Lange, A. E.
(California Inst. of Tech. Pasadena, CA United States)
Mauskopf, P. D.
(California Inst. of Tech. Pasadena, CA United States)
Date Acquired
August 17, 2013
Publication Date
December 1, 1996
Subject Category
Spacecraft Instrumentation
Accession Number
97N20399
Funding Number(s)
CONTRACT_GRANT: NAGw-4754
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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