Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Tabory, Charles N. (Toledo Univ. OH United States) Young, Paul G. (Toledo Univ. OH United States) Smith, Edwyn D. (Toledo Univ. OH United States) Alterovitz, Samuel A. (NASA Lewis Research Center Cleveland, OH United States) Date Acquired
August 17, 2013
Publication Date
February 1, 1994
Publication Information
Publication: Journal of Vacuum Science Technology B
Publisher: American Vacum Society
Volume: 12
Issue: 1
ISSN: 0734-211X
Report/Patent Number
NASA-TM-112737NAS 1.15:112737 Accession Number
97N71966
Distribution Limits
Public
Copyright
Public Use Permitted.