Overcoats for the Improved Performance of PdCr High Temperature Thin Film Strain Gages

Overcoat protection schemes for thin film devices have typically focused on inhibiting the growth of native oxides formed on the sensor surface, rather than on improving the passivating nature of these native oxides. Here, thin sputtered Cr overcoats and heat treatments in varying oxygen partial pressures enhanced the passivating nature of native Cr203 films formed on PdCr thin film strain gages. Results of strain tests using sensors protected using this approach are presented and the implications are discussed. PdCr gages with sputtered Cr overcoats withstood 12,000 dynamic strain cycles of 1100 micro-epsilon during 100 hours of testing at a temperature of 1000 C in air. Gage factors of 1.3 with drift rates as low as 0.1 Omega/hr were achieved for devices having a nominal resistance of approximately 100 Omega's. TCR's ranging from +550 ppm/C to +798 ppm/C were realized depending on the overcoat and thermal history. Possible mechanisms for an anomaly in the electrical characteristics of these films at 800 C and improvements in stability due to the use of overcoats are presented.