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Computation of Static Shapes and Voltages for Micromachined Deformable Mirrors with Nonlinear Electrostatic ActuatorsIn modeling micromachined deformable mirrors with electrostatic actuators whose gap spacings are of the same order of magnitude as those of the surface deformations, it is necessary to use nonlinear models for the actuators. In this paper, we consider micromachined deformable mirrors modeled by a membrane or plate equation with nonlinear electrostatic actuator characteristics. Numerical methods for computing the mirror deformation due to given actuator voltages and the actuator voltages required for producing the desired deformations at the actuator locations are presented. The application of the proposed methods to circular deformable mirrors whose surfaces are modeled by elastic membranes is discussed in detail. Numerical results are obtained for a typical circular micromachined mirror with electrostatic actuators.
Document ID
19990009586
Acquisition Source
Headquarters
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Wang, P. K. C.
(California Univ. Los Angeles, CA United States)
Hadaegh, F. Y.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States)
Date Acquired
August 19, 2013
Publication Date
September 1, 1996
Publication Information
Publication: Journal of Microelectromechanical Systems
Publisher: Institute of Electrical and Electronics Engineers
Volume: 5
Issue: 3
ISSN: 1057-7157
Subject Category
Optics
Distribution Limits
Public
Copyright
Other

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