Acquisition Source
Headquarters
Document Type
Reprint (Version printed in journal)
Authors
Wang, P. K. C. (California Univ. Los Angeles, CA United States) Hadaegh, F. Y. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA United States) Date Acquired
August 19, 2013
Publication Date
September 1, 1996
Publication Information
Publication: Journal of Microelectromechanical Systems
Publisher: Institute of Electrical and Electronics Engineers
Volume: 5
Issue: 3
ISSN: 1057-7157
Distribution Limits
Public