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Influence of Natural Convection and Thermal Radiation Multi-Component Transport in MOCVD ReactorsThe influence of Grashof and Reynolds number in Metal Organic Chemical Vapor (MOCVD) reactors is being investigated under a combined empirical/numerical study. As part of that research, the deposition of Indium Phosphide in an MOCVD reactor is modeled using the computational code CFD-ACE. The model includes the effects of convection, conduction, and radiation as well as multi-component diffusion and multi-step surface/gas phase chemistry. The results of the prediction are compared with experimental data for a commercial reactor and analyzed with respect to the model accuracy.
Document ID
19990040308
Acquisition Source
Marshall Space Flight Center
Document Type
Conference Paper
Authors
Lowry, S. (CFD Research Corp. Huntsville, AL United States)
Krishnan, A. (CFD Research Corp. Huntsville, AL United States)
Clark, I. (NASA Langley Research Center Hampton, VA United States)
Date Acquired
August 19, 2013
Publication Date
February 1, 1999
Publication Information
Publication: NASA Microgravity Materials Science Conference
Subject Category
Fluid Mechanics And Heat Transfer
Funding Number(s)
CONTRACT_GRANT: NAS8-40846
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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IDRelationTitle19990040241Collected WorksNASA Microgravity Materials Science Conference
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