Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Li, Mary J. (Raytheon STX Corp. Greenbelt, MD United States) Allen, Christine A. (NASA Goddard Space Flight Center Greenbelt, MD United States) Gordon, Scott A. (NASA Goddard Space Flight Center Greenbelt, MD United States) Kuhn, Jonathan L. (NASA Goddard Space Flight Center Greenbelt, MD United States) Mott, David B. (NASA Goddard Space Flight Center Greenbelt, MD United States) Stahle, Caroline K. (NASA Goddard Space Flight Center Greenbelt, MD United States) Wang, Liqin L. (Unisys Corp. Lanham, MD United States) Date Acquired
August 19, 2013
Publication Date
July 14, 1999
Subject Category
Instrumentation And Photography Meeting Information
Meeting: Micromachining and Microfabrication
Location: Santa Clara, CA
Country: United States
Start Date: September 20, 1999
End Date: September 21, 1999
Sponsors: International Society for Optical Engineering
Distribution Limits
Public